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Simulation experimental investigation on job release control in semiconductor wafer fabrication

机译:半导体晶片制造中的借鉴试验控制的模拟实验研究

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This paper presents a new job release methodology, WIPLOAD Control, especially in semiconductor wafer fabrication environment. The performance of the proposed methodology is evaluated in a simulation study on a simplified wafer fabrication model, in comparison with other existing release control methodologies. A case study is also conducted by simulating a real-life wafer fabrication facility. Based on the experimental results, it appears that WIPLOAD Control is a reliable job release methodology, which can efficiently reduce average cycle time and standard deviation of cycle time for a given throughput level, especially with the increase of system congestion level and system variability caused by stochastic events such as machine unreliability or processing time variability.
机译:本文提出了一种新的求职方法,威素控制,特别是在半导体晶片制造环境中。与其他现有释放控制方法相比,在简化晶片制造模型的模拟研究中评估了所提出的方法的性能。还通过模拟真实寿命晶片制造设施进行案例研究。基于实验结果,似乎Wipload控制是一种可靠的作业释放方法,可以有效地降低给定吞吐量的平均循环时间和循环时间的标准偏差,特别是随着系统拥塞水平和系统变异的增加随机事件,如机器不可靠性或处理时间可变性。

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