Specification and measurement of uncertainty in phase shifting Fizeau interferometry

摘要

Understanding measurement uncertainty is critical for qualifying an instrument for a specific task and for improving the instrument's performance. Specifying that uncertainty requires a precise definition of the particular quantity being measured and the conditions under which it is measured. These should both be relevant to the end user's application. In this paper I re-examine and summarize some of the definitions and test methods that have been used to characterize Fizeau interferometers and attempt to encourage a discussion about how to best specify the performance of Fizeau interferometers for today's demanding applications.