Phase extraction for dual-wavelength phase-shift Fizeau interferometry in the presence of multi-beam interference

摘要

Dual-wavelength interferometry could extend the measured range of single-wavelength interferometry by combining the two single wavelength phases, particularly for the measurement of step height. When testing the high-reflectivity surfaces with the single wavelength Fizeau interferometer, we have presented the pi/4 phase-shift carrier squeezing interferometry (QCSI) method for phase extraction with multi-beam interference (AppL Opt. 55, 1920-1928, 2016). In this paper, we propose an integer and decimal portions synthetization (IDS) method for the multi-beam interference in the dual-wavelength Fizeau interferometer. One of the single wavelength wrapped phases is demodulated by the multi-beam interference QCSI algorithm, while the second of the single wavelength wrapped phases is extracted by the conventional two-beam interference phase-shift algorithm, so the equivalent wavelength unwrapped phase is derived from the two single wavelength wrapped phase. The decimal portion of synthesized phase is then obtained directly from the first single wavelength wrapped phase, and the integer portion of synthesized phase is obtained from the fringe order of the first single wavelength wrapped phase determined by the equivalent wavelength unwrapped phase. The proposed non-iterative IDS method avoids the common error magnification effect in the two-wavelength techniques, and only requires no more than 8 frame phase-shift interferograms for each single wavelength. Its robust performance is validated by both simulations and experiments in the presence of multi-beam interference as well as phase-shift error for measuring objects with height discontinuities. (C) 2017 Elsevier B.V. All rights reserved.