Fabrication and Testing of Single Photon Avalanche Detectors in the TSMC 0.18驴m CMOS Technology

摘要

We report on the fabrication and preliminary testing of a single photon avalanche detectors (SPAD) fabricated in the TSMC 0.18驴m standard CMOS technology (CM018). The detectors exhibit low dark count rate and robust geiger-mode operation at room temperature.