Actinic Review of EUV Masks: Status and Recent Results of the AIMS? EUV System

摘要

Key enabler of the successful introduction of EUV lithography into volume production is the EUV mask infrastructure. For the production of defect free masks, actinic review of potential defect sites to decide on the need for repair or compensation is required. Also, the repair or compensation with the ZEISS MERiT electron beam repair tool needs actinic verification in a closed loop mask repair solution. For the realization of actinic mask review, ZEISS and the SEMATECH EUVL Mask Infrastructure consortium started a development program for an EUV aerial image metrology system, the AIMS? EUV, with realization of a prototype tool. The development and prototype realization of the AIMS? EUV has entered the tool calibration and qualification phase utilizing the achieved capabilities of EUV aerial image acquisition and EUV mask handling. In this paper, we discuss the current status of the prototype qualification and show recent measurement results.