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Production of silicon pore optics

机译:生产硅孔光学

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摘要

New astronomical science missions demand X-ray telescopes with an angular resolution better than 5" and effective areas of up to 5 m2 at 1 keV. Traditional technologies like nickel electro-forming or polished glass surfaces lead to long and heavy structures, which require prohibitive mass resources to achieve the required large collecting area. To overcome this problem an entirely novel technology using silicon wafers has been developed resulting in pore X-ray optics, which form very light, stiff and modular structures. The suitability of silicon wafers to be used as high quality optical material has been demonstrated and semiconductor industry have developed methods to structure the wafers such, that they can be assembled into segments of Wolter-I optics. For the assembly of these, so called High Performance Pore Optics (HPO), we have developed an automated production robot. The assembly process and the required metrology is described in detail and experimental methods are shown, which allow to assess the quality of the HPOs during production and to predict their performance when measured in synchrotron radiation facilities.
机译:新的天文科学任务要求角度分辨率的X射线望远镜优于5英寸,有效地区高达5平方米,在1 kev。像镍机电或抛光玻璃表面一样的传统技术导致长而重的结构,需要禁止群众资源实现所需的大型收集区。为了克服这个问题,已经开发了一种完全使用硅晶片的新技术,从而形成孔X射线光学系统,形成非常光,僵硬和模块化结构。使用硅晶片的适用性由于高质量的光学材料已经证明,并且半导体工业已经开发出用于构造晶片的方法,即它们可以组装到Wolter-I光学器件的区段中。对于这些,所谓的高性能孔光学(HPO),我们已经开发了一种自动化的生产机器人。详细描述了组装过程和所需的计量和所需的计量,并显示实验方法,Whic H允许在生产过程中评估HPO的质量,并在同步辐射设施中测量时预测其性能。

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