A Position Detection Sensor for 3-D Measurement

摘要

In this paper, a position detection sensor for 3-D measurement is presented. The sensor is designed for detecting positions of laser spots projected on target objects quickly. The sensor has a 256 X 256 pixel array, a set of address decoders for variable block access and a variable block logical-OR circuit on an 8.9mm X 8.9mm die. The sensor is designed and fabricated in 0.6 μm 3-Metal 2-Poly-Si CMOS process. By the result of measurements using fabricated chips, the accuracy of the 3-D measurement is 0.4%. The speed of 3-D measurement is up to 10000points/sec.