Deposition speed optimization for ZnO nanoparticle TFTs using doctor blade process

摘要

The number of scopes for transparent and flexible electronics increases with the spreading of the Internet of Things (IoT). For a variety of applications such as flexible displays, radio frequency identification tags (RFID) or smart clothes thin-film transistors (TFTs) are the fundamental active elements in the needed electrical circuits. Aiming at a low-cost manufacturing of these devices we present an integration process for ZnO nanoparticle TFTs with a coating method using a doctor blade. To improve the layer quality and thus to enhance the transistor performance the deposition process is optimized regarding the substrate temperature. Therefor an inverted coplanar template is used.