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Microstructural Aspects of Fracture in Nanolayered TiAlCrN Thin Films

机译:纳米层状 TiAlCrN 薄膜中断裂的微观结构方面

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This paper studies the effects of bilayer thickness and chromium content on the microstructure and mechanical properties of nanolayered TiAlN/CrN thin films. By rotation of samples holder and control of targets activity, a variety of multilayers and chemically modulated thin films were grown on WC-Co substrates using cathodic arc PVD. Conventional and high resolution TEM showed that aluminum contributes to refinement of structure while chromium favors the formation of coarse columnar morphology. Consequently, TiAlN layers periodically interrupt the formation of columns in CrN layers in multilayer films, while in chemically modulated samples the columns are not interrupted leading thus to the formation of strongly columnar films. Both Cr content and bilayer thickness contribute to hardness enhancement. Effect of Cr arises from the formation of hard fcc-(CrAl)N phase to the detriment of softer wurtzite-like hcp-AlN. The contribution of bilayer thickness is explained by the grain refinement based on Hall-Petch effect and the formation of highly stressed columnar structures with (111) preferred orientation. Such structural modifications strongly influence crack modes and morphologies as observed using AFM and FIB cross-section of indents. Thin bilayer films exhibit well-organized straight cracks parallel to the contact edge between indenter and film, while large bilayer films show a network of discontinuous irregular mud cracks attributed to grain boundary sliding. Refinement of structure favours crack meandering and branching that prevents the propagation of large cracks with more dramatic effects.
机译:本文研究了双层厚度和铬含量对纳米层状 TiAlN/CrN 薄膜微观结构和力学性能的影响。通过旋转样品架和控制靶标活性,使用阴极电弧 PVD 在 WC-Co 衬底上生长各种多层和化学调制薄膜。常规和高分辨率 TEM 表明,铝有助于结构细化,而铬有利于形成粗柱形貌。因此,TiAlN 层周期性地中断了多层膜中 CrN 层中色谱柱的形成,而在化学调制样品中,色谱柱不会中断,从而导致形成强柱状膜。Cr 含量和双层厚度都有助于提高硬度。Cr 的影响源于硬 fcc-(CrAl)N 相的形成,从而损害了较软的纤锌矿状 hcp-AlN。双层厚度的贡献可以通过基于 Hall-Petch 效应的晶粒细化和形成具有 (111) 择优取向的高应力柱状结构来解释。这种结构修饰强烈影响使用 AFM 和 FIB 压痕横截面观察到的裂纹模式和形态。薄双层薄膜表现出平行于压头和薄膜之间接触边缘的组织良好的直线裂纹,而大的双层薄膜则显示出由晶界滑动引起的不连续不规则泥裂纹网络。结构的细化有利于裂纹的蜿蜒和分支,从而防止大裂纹的扩展,从而产生更戏剧性的效果。

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