Influence of annealing on the structural, morphology and optical properties of TiO2 thin films

摘要

TiO2 thin films were deposited by Spray Pyrolysis with thickness ((350±25) nm) onto glass substrates at (350°C). The influence of annealing temperatures (400,450 and 500°C) on the structural, morphology and optical properties of the films were studied by using X-ray diffraction (XRD), Scanning Electron Microscopic (SEM), Atomic Force Microscopy (AFM), and UV-Visible spectrometry respectively. X-ray diffraction (XRD) analyses appeared that the as-deposited thin films have an amorphous structure, with annealing the amorphous phase was crystallized into tetragonal TiO2 phase, and the size of the crystallites increased from (8.28 to 10.37) nm. Atomic force Microscopy and UV-Visible spectrometry analysis of TiO2 thin films showed that the roughness increased (2.96 to7.63) nm and optical energy gap shift to higher energies with increasing annealing temperature.