Work Function Extraction of BCN Thin Films from BCN/n-Si Heterojunction Devices

摘要

Boron carbon nitride (BCN) has gained attention due to its structural similarity to carbon and boron nitride. BCN compounds are known to combine excellent properties of B4C and BN, with properties being adjustable depending on elemental composition. BCN is a low-k material (k=2.13) and very high breakdown strength (～3.4 MV/cm). Additionally, the ability to control band gap by atomic composition and structure makes BCN films suitable for applications in electronic and optical devices.