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Micro-Compression Characterization of Electrodeposited Nickel Phosphorus Amorphous Alloys for MEMS Application

机译:用于MEMS应用的电沉积镍磷非晶合金的微压缩表征

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摘要

This study reports mechanical property evaluation of electrodeposited nickel phosphorus amorphous alloys. Electrodeposited nickel materials have excellent properties such as high elastic modulus, high strength, low internal stress, and excellent conductivity, and are expected to be applied to micro-sized machines and micro electro mechanical systems. An example is nickel phosphorous amorphous alloys, which are commonly used as structure materials in microelectromechanical system devices.
机译:本研究报告了电沉积镍磷非晶合金的力学性能评价。 电沉积的镍材料具有优异的性能,例如高弹性模量,高强度,低的内应力和优异的导电性,并且预计将应用于微大型机器和微电器机械系统。 一个例子是镍磷非晶合金,通常用作微机电系统装置中的结构材料。

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