Influence of hydrogen on optical properties of LPCVD amorphous silicon films

摘要

The dependence of different optical parameters such as refractive index (n), optical absorption coefficient (a), slope of Tauc plot (C), optical band gap (E_G), dispersion energy (E_d), average excitation energy (E₀), static refractive index (n ₀) on hydrogen content is reported in this paper. It was found that these parameters significantly depend on hydrogen concentration in LPCVD amorphous silicon films