The PDMS micro valve driven by PZT piezoelectric actuator on the silicon wafer

摘要

Microfluidic components are basic tools in microanalysis systems. A simple structure PDMS micro valve is described. Driven by the PZT piezoelectric actuator, this microvalve could realize to control the liquid flow rate in the microliter or submilliliter scale. The fabrication method about the PZT piezoelectric thick film with the screening printing technique and the Polydimethylsiloxane (PDMS) valve body with the soft lithography technique are presented. The optimal PZT film processing annealing temperature parameter at 800 in 60 min could be observed, the PZT grain size is about 1μm or more. Then the silicone substrate and the drilled PDMS top substrate are bonded together with the oxygen plasm to form the chamber. The overall dimensions of the valve are 10mm x 10mm x 2mm. While the dead volume is 0.1 ml, and the inner diameter of the valve seat is 6 mm. Finally, the performance of the PDMS valve is tested.