Application of Atomic Force Microscopy on the Nanometer Scale Surface Roughness Measurement

摘要

In this paper, The datum line assessing surface roughness parameters and main three profile height parameters of surface roughness are introduced in detail, and the emphasis is laid on the operation principle of Atomic Force Microscopy Institute of Particle Physics Chongqing University (AFM.IPC-208B) and its software implementation method on the nanometer scale surface roughness measurement. The three-dimensional AFM image of polished stainless steel surface in real space was obtained by AFM.IPC-208B, the surface data were analyzed and transacted by special evaluator, and the values of three profile height parameters were obtained. Finally, the experimental results were analyzed briefly