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Low cost high density multilayer interconnection technology

机译:低成本高密度多层互连技术

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摘要

Ceramic thick film technology has proven over the years to be a very reliable technology yielding electronic circuits with excellent performance, suitable for even the most demanding environments. In today's electronics functional integration and system miniaturisation are key issues in hardware design and implementation. It is obvious that in order to address these needs every interconnection technology is evolving towards higher integration densities. In thick film technology recent developments have proven the capability to provide higher interconnection densities by means of combining the photolithography with standard thick film processes. Initially, these innovative material systems were based on gold as a conductor material addressing primarily high performance applications. The replacement of gold by silver bearing conductors in complement with a reliable high performance dielectric would allow to form a multilayer interconnection technology with a comparable performance, but with a very important cost reduction.
机译:多年来,陶瓷厚膜技术已经证明是一种非常可靠的技术,可提供电子电路,性能优异,适用于最苛刻的环境。在当今的电子产品中,功能集成和系统小型化是硬件设计和实施的关键问题。显而易见的是,为了解决这些需求,每个互连技术正在发展到更高的集成密度。在厚膜技术中,最近的发展已经证明了通过将光刻法与标准厚膜工艺组合的能力来证明能力提供更高的互连密度。最初,这些创新的材料系统基于黄金作为导体材料,主要是高性能应用。通过可靠的高性能电介质补充用银轴承导体更换金色轴承导体将允许形成具有可比性的多层互连技术,但具有非常重要的成本降低。

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