Femtosecond laser micromachining of SiC ceramic structures

摘要

Femtosecond laser micromachining technology shows abroad application background in the field of micro manufacturing due to its unique advantages, especially for micromachining of ultrahard materials such as Silicon carbide (SiC) ceramic. The femtosecond laser micromachining system was set up, by using the system, effects of scanning velocity and laser pulse energy on quality of micromachined features were evaluated. The optimized technological parameter was obtained as 8mW, 1mm/s with 1kHz repetition frequency respectively on the basis of the morphological characteristics and microstructure accuracy. Besides, V-shaped cavity of 300μm depth and 120°angle was generated with layer-by-layer scan machining. Thus femtosecond laser micromachining technology is an effective method for hard and brittle materials precision processing.