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Pressureless Low Temperature Sintering of Ag Nanoparticles for Interconnects

机译:用于互连的Ag纳米粒子的无压力低温烧结

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Cu-to-Cu interconnects were achieved by pressureless low temperature sintering of Ag nanoparticles for electronic packaging. Ag nanoparticles could be sintered so long as the chemical bonds by which organic shells connected with Ag nanoparticles were broken with no necessity that organic shells completely decomposed, which provided a way to lower bonding temperature. The pinecone-like recrystallization morphology of sintering Ag nanoparticles was observed by transmission electron microscopy, which resulted from the residuals of organic shells by sintering process. The thermal conductivity of sintered Ag nanoparticles was affected strongly by the recrystallization morphology because of grain boundary scattering effect. The shear strengths of joints reached 17-25 MP a at temperatures ranging from 150°C to 200 °C.
机译:通过用于电子包装的Ag纳米颗粒的无压耐温度烧结来实现Cu-To-Cu互连。 可以将Ag纳米颗粒烧结,只要与Ag纳米颗粒连接的有机壳被破坏的化学键,没有必要的有机壳完全分解,这为降低键合温度提供了一种方法。 通过透射电子显微镜观察烧结Ag纳米颗粒的PineCone的重结晶形态,从而通过烧结过程由有机壳残留物引起的。 由于晶界散射效应,重结晶形态强烈地受到烧结Ag纳米颗粒的导热率。 接头的剪切强度在150℃至200℃的温度下达到17-25mPa。

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