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Micromechanical magnetometers based on clamped-clamped high-Q nonlinear resonators

机译:基于夹紧夹紧高Q非线性谐振器的微机械磁力计

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We present a new type of magnetic field detector that uses a nonlinear micromechanical oscillator for sensing. This is the first fabricated magnetometer that takes advantage of the geometrically induced nonlinearities in a clamped-clamped beam. It does not incorporate magnetic materials, and its fabrication is fully compatible with standard semiconductor processes. In this sensor, the magnetic field B applied to the resonant beam can be detected by measuring the shift that it produces in fpeak, the frequency of maximum oscillation amplitude. This frequency shift is linked to a reduction of the quality factor and only occurs if the oscillator is in the nonlinear regime. It is originated by the ohmic losses induced by the applied magnetic field, which dissipate part of the mechanical energy stored in the oscillator.
机译:我们提出了一种新型的磁场检测器,其使用非线性微机械振荡器进行传感。 这是第一种制造的磁力计,其利用夹紧夹持梁中的几何诱导的非线性。 它不包含磁性材料,其制造与标准半导体工艺完全兼容。 在该传感器中,可以通过测量在F 峰值中产生的频率,最大振荡幅度的频率来检测施加到谐振光束的磁场B。 该频移与质量因子的减小相关联,并且如果振荡器处于非线性状态,则才会发生。 它源自由所施加的磁场引起的欧姆损失,该磁场散发存储在振荡器中的一部分机械能。

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