Advances in polymer-coated surface acoustic wave gas sensor

摘要

This paper presents some advances in polymer-coated surface acoustic wave (SAW) gas sensor research towards to organophosphorous compounds detection relating to the response mechanism analysis by using some new chemically interactive materials and deposition techniques, and SAW oscillator with superior frequency stability, which are illustrated and discussed in some detail. A 300MHz SAW based delay-line-oscillator coated with PECH(Poly(epichloro-hydrin)) for HD (mustard) detection was performed, in which, a single phase unidirectional transducers (SPUDT) and combed transducer were used to structure the SAW device. The sensor experimental results confirmed the theoretical analysis, high sensitivity and good stability were observed experimentally.