Material removal and plasmadynamics during pulsed laser deposition by excimer and CO_2 laser radiation

摘要

The laser-induced mateiral removal and plasma formation during pulsed laser deposition (PLD) with CO_2 and excimer laser radiation are simulated. The weight loss of the target is determined by the process of heating and the dynamics of the plasma state above the target. The plasma state depends on the wavelength and the fluence of the laser radiation and the pressure of the processing gas. In the case of CO_2 laser radiation the plasma state influences the weight loss significantly, while in the case of excimer laser radiation there is less influence.