A quantitative method of Foucault test and its instrument realization in optical testing

摘要

In this paper, we present a quantitative mathematical model of Foucault test that we have developed which mainly use the method of light trace-out, and show how this model works with an X-Y axis automation module and digital grams processing to aid quantitative optical mirror testing. We also present our verification work through building up a new Foucault test instrument system and show the testing result about a finishing product-a small diameter sphere mirror. Additionally, we verify the method by simulation work and counterpart testing result of interferometer. Through the work, we want to develop an easy-to-conduct method of efficiency optical surface wave-front errors testing which use limited optical images with location information to solve the target image and a much cheaper quantified optical-testing-instrument solution than traditional and general method of laser interferometry instrument.