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Critical pressure during the formation of carbon nanotubes by the method of plasma chemical vapor deposition

机译:通过等离子体化学气相沉积方法形成碳纳米管期间的临界压力

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The critical pressure of acetylene required for the formation of nanotubes on nickel catalytic centers of a given size was calculated by plasma chemical vapor deposition. It has been established that for a stable growth of carbon nanotubes on a catalytic center with a diameter of 20 nm, the critical pressure of acetylene should be 1.9 Pa, while the growth time of carbon nanotubes in length of 5 μm is 131 sec. Nickel was used as a material for the formation of catalytic centers. In the calculations, the averaged parameters of carbon nanotubes were used. This analysis allowed to form a number of criteria for the materials of the underlayer and catalytic centers, to obtain an array of carbon nanotubes with a high degree of verticality.
机译:通过等离子体化学气相沉积计算在给定尺寸的镍催化中心上形成纳米管所需的乙炔的临界压力。 已经确定,对于直径为20nm的催化中心在催化中心的稳定生长,乙炔的临界压力应为1.9Pa,而碳纳米管长度为5μm的生长时间为131秒。 用作形成催化中心的镍作为形成的材料。 在计算中,使用碳纳米管的平均参数。 该分析允许形成底层和催化中心的材料的许多标准,以获得具有高垂直度的碳纳米管阵列。

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