Study of the influence of the electrophysical properties of ZnO nanorods grown on glass on their gas-sensitive properties

摘要

The article discusses the sensory properties of an array of ZnO-based nanorods, which were used as sensitive elements of carbon (II) oxide sensors. By hydrothermal synthesis, arrays of ZnO nanorods were grown on glass, which had an average transverse size of up to 40 nm and a height of up to 660 nm. Formed rods had a predominantly vertical orientation. Metal contacts were formed over the array of nanorods. Studies of the electrophysical properties showed that the temperature dependence of the conductivity of the formed structure has a hysteresis at temperatures above 160 °C, and the current-voltage characteristic is close to linear. The gas sensitive properties of the ZnO array of nanorods were investigated to carbon monoxide (II) with a concentration of 20-100 ppm at operating temperatures from 20 to 270 °C. It has been shown that the sensor response is strongly influenced by the rate of blowing the array with nanorod air or the test gas.