Magnetron Deposition of Metal-Ceramic Protective Coatings on Glasses of Windows of Space Vehicles

摘要

Transparent refractory metal-ceramic nanocomposite coatings with a high coefficient of elastic recovery and microhardness on the basis of Ni/Si–Al–N are formed on a glass substrate by the pulse magnetron deposition method. The structure-phase states were investigated by TEM, SEM. It was established that the first layer consists of Ni nanograins with a fcc crystalline lattice, the second layer is two-phase: 5–10 nm nanocrystallites of the AlN phase with the hcp crystalline lattice in amorphous matrix of the Si_3N_4 phase.