SEM image and EDS composition analysis of Al_2O_3 power under low vacuum level condition

摘要

The surface morphology of the Al_2O_3 powder was observed by SEM and the composition content was analyzed by EDS spectrum under different vacuum level condition. The effects of the atmosphere pressure on the SEM image quality and EDS analysis were explored systematically. The platinum sputtering treatment on the materials surface in high vacuum mode is beneficial to the observation of the images but has negative effects on the analysis of O and Al elements. The decrease of vacuum degree in low vacuum mode can result in the drop of the image resolution and EDS spectrum accuracy. However, clear SEM image and EDS composition analysis result near to the real element kinds and contents of sample can be obtained in the low vacuum mode of 1Pa～50Pa.