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A novel ZnO-based graphite-insulator-semiconductor diode for transferable unipolar electronic devices

机译:一种用于可转移单极电子设备的新型ZnO基石墨绝缘体半导体二极管

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In this paper, a novel ZnO-based graphite-insulator-semiconductor (GIS) diode was fabricated on graphite substrate by radio frequency (rf) magnetron sputtering. A SiO_2 thin film was used as the insulator layer grown by electron beam evaporation technique. The measurement of current-voltage of the ZnO-based GIS diode showed a Schottky rectifying diode characteristic with a threshold voltage of 5.2 V and a poor leakage current of ~10~(-3) A under a reverse bias condition. An interesting negative capacitance phenomenon was also observed from the GIS diode. The successful fabrication of ZnO-based GIS diode on graphite substrate offers the significant opportunity to be readily transferred onto any rigid or flexible foreign substrates, since the graphite substrate consists of weakly bonded layer structure.
机译:本文通过射频(RF)磁控溅射在石墨衬底上制造了一种新的基于ZnO的石墨绝缘体 - 半导体(GIS)二极管。使用SiO_2薄膜作为通过电子束蒸发技术生长的绝缘层。基于ZnO的GIS二极管的电流电压的测量显示了在反向偏置条件下的阈值电压为5.2V的阈值电压和〜10〜(-3)A的漏电流差的肖特基整流二极管特性。来自GIS二极管也观察到有趣的负电容现象。在石墨基板上成功制造ZnO的GIS二极管提供了易于转移到任何刚性或柔性的异物上的重要机会,因为石墨基板由弱粘合的层结构组成。

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