H_2O_2 and Alcohol Sensors on Porous Silicon

机译：H_2O_2和多孔硅的酒精传感器

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In the paper simple Me/por-Si/Me structures are used as hydrogen peroxide and alcohol sensors with sensitivity up to 3μA/% and 5.3μA/% respectively. It was shown that depending on formation conditions porous silicon layer formed in different etching solutions can be selective between two substances.

机译：在本文中，简单的ME / POR-SI / ME结构用作过氧化氢和醇传感器，敏感性可达3μA/％和5.3μA/％。结果表明，取决于在不同蚀刻溶液中形成的多孔硅层可以在两种物质之间选择。

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《IEEE International Conference on Electronics and Nanotechnology》|2016年|390p|共3页
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Artiom Movchan; Tetyana Obukhova; Maria Stepanova;
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中图分类 TB383-53;
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Porous silicon; Sensor; Wet etching;

机译：多孔硅;传感器;湿法蚀刻;

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专利

1. Characterization of hydrophobic, oxidized porous silicon layer formed by anodic etching of n~+-type silicon surface in a HF:C_2H_5OH:HCl:H_2O_2:H_2O electrolyte for bio-application [J] . M. Naddaf, A. Almariri Applied Physics . 2014,第3期

机译：通过在生物应用的HF：C_2H_5OH：HCl：H_2O_2：H_2O电解质中对n〜+型硅表面进行阳极刻蚀而形成的疏水氧化多孔硅层的表征
2. The Potential for Alcohol-containing Gas Sensors Based on DBR Porous Silicon [J] . Kim YY, Kim HJ, Lee KW Journal of the Korean Physical Society . 2009,第2期

机译：基于DBR多孔硅的含酒精气体传感器的潜力
3. Capacitive porous silicon sensors for measurement of low alcohol gas concentration at room temperature [J] . Seong-Neen Kim, Byung-Hyun, Kyu-Seong Choi, Journal of solid state electrochemistry . 2000,第6期

机译：电容式多孔硅传感器，用于在室温下测量低酒精气体浓度
4. H_2O_2 and Alcohol Sensors on Porous Silicon [C] . Artiom Movchan, Tetyana Obukhova, Maria Stepanova IEEE International Conference on Electronics and Nanotechnology . 2016

机译：H_2O_2和多孔硅的酒精传感器
5. Implementation of Porous Silicon Technology for a Fluidic Flow-Through Optical Sensor for pH Measurements. [D] . Vanga, Kumar L. 2012

机译：用于测量pH的流体直通光学传感器的多孔硅技术的实现。
6. Porous Silicon Gas Sensors: The Role of the Layer Thickness and the Silicon Conductivity [O] . Francisco Ramírez-González, Godofredo García-Salgado, Enrique Rosendo, 2020

机译：多孔硅气体传感器：层厚度和硅电导率的作用
7. Fluorinated porous silicon as sensor material for environmentally toxic gases: a first-principles study [O] . José Eduardo Santana, Francisco de Santiago, Álvaro Miranda, 2021

机译：氟化多孔硅作为环形毒性气体的传感器材料：第一原理研究

H_2O_2 and Alcohol Sensors on Porous Silicon

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