The study on deposition of Cu/Co multilayer nano thin films under gravitational effect by molecular dynamics

摘要

This paper has successfully constructed the multilayer nano thin film deposition simulation model with molecular dynamics under the effect of gravity in a vacuum environment. Simulation results show that under gravity environment, the surface morphology becomes less flat, and the internal stress are larger. In higher deposition rate, the internal stress also increases, and the surface morphology of the thin film becomes, the more uneven. As the increase of substrate temperature, the internal stress of deposited nano thin film is reduced but the interfacial bonding energy is an increase. And the higher the substrate temperature, the surface topography is more flatten.