Comparison of Thomson scattering and Langmuir probe for electron property measurements in a DC magnetron plasma

摘要

I. Introduction Accurate and reliable electron property measurements are essential for understanding many different plasma phenomena, such as, particle collisions, reactions and plasma-surface interactions. Langmuir probes are widely used in low temperature plasma for electron temperature T_e and density n_e measurements because of the relative simplicity of the experimental technique, as well as, providing a localised measurement. However, there is no satisfactory theory for the case of magnetised plasma because cross-field transport mechanisms are poorly understood [1]. Consequently, there is difficulty modelling transport anisotropy and voltage drops consumed by plasma or sheath impedances outside of the probe sheath.