3D electrostatic actuator fabricated by non-ablative femtosecond laser exposure and chemical etching

摘要

We demonstrate the novel design of an electrostatic micro-actuator based on monolithic three-dimensional (3D) shapes fabricated by non-ablative femtosecond laser exposure combined with chemical etching. Further, we present a single-scan stacking approach exploited in the fabrication of the 3D actuator to create crack-free, high contrast, high fidelity and integrated micro-structures. Influential parameters: energy per pulse, polarization, scanning spacing and stacking direction were systematically studied to predict and control the etching rate of 3D planes. Finally, we report the characterization of the actuator and its potential application in optomechanics to show a complete scenario of femtosecond laser machined integrated 3D micro-systems incorporating multiple functionalities.