High Precision Work Station Research

摘要

A wide range of high precision work station can today be using various fields. The position precision will directly determine the precision and ultra precision processing equipment machining accuracy. It is necessary to research highly precise station system. In this paper, the development of a two-dimensional worktable with high accuracy is presented. This work station uses the linear motor as the driving source. First of all, the components of the station technology and its control system are described. The latter comprises a grating scale sensor system for position measuring. The accuracy and repeatability of work station achieved high requirements.