Optimization of probe capability using MPCps

摘要

Based on the MPCpS, it has been concluded that Probe Damage Occurrence at Prober X using blade type needle are caused by Capability Limitation. Set-up constraint is the reason for Capability issue. Optimum Setting determined from Stage 4 has been immediately implemented. There is a Characterization made separately for checking of consequential effect since the contact during Probing is being decreased approximately 1 mil. Implementation of the change in over travel setting resulted to significant decrease in terms of Probe Damage ppm.