A Theoretical Study on the MEMS-based Thermal Conductivity Sensor

摘要

To get precise thermal conductivities of biomaterials with a variety of shapes and sizes, the small thermal conductivity sensor that can adapt to the features of biomaterials has been produced by MEMS technology. In this paper, a heat transfer model was developed to study the performance of the MEMS-based sensor. Thermal conductivities of a series of materials were determined numerically using this model which agree well with the standard thermal conductivities of materials, the simulation showed that this kind of the sensor can provide efficiently accurate thermal conductivities. The results in this paper can be used to insight in the improvement of the MEMS-based thermal conductivity sensor.