Micro-structure and Hardness of (Ti, Al, Nb)N Coatings Prepared under Different Negative Pulse Bias by Arc Ion Plating

摘要

In this study, composite metastable (Ti, Al, Nb)N coatings were respectively deposited on a wrought martensite steel 1Cr11Ni2W2MoV by arc ion plating technique with different negative pulse bias. With the increase of negative bias, the deposition rate initially increases and then decreases, metallic composition of the coatings deviates from the target more obviously, grain size is refined and the orientation of B1 phase changes from (111) to (220), and the hardness of the coatings improve first and then drop.