The Role of Grain Size in Response of SnO_2- and ln_2O3-based Conductometric Gas Sensors

摘要

Basing on the experimental results, obtained while studying both structural and gas sensing properties of the Sn02 and In203 films deposited by spray pyrolysis method, it was analyzed the influence of the crystallites size on the response of the Sn02- and In203-based thin film gas sensors. It was confirmed that that the grain size is one of the most important parameters of metal oxides, controlling almost all operating characteristics of the solid state gas sensors. However, it was shown that the decrease of the grain size is not a universal decision contributing to the improvement of sensor response. The decrease of the grain size could be accompanied either by the improvement, or the worsening of gas sensor operating characteristics.