The Powerful Combination of Ion-Milling Method for XTEM Preparation: Application to a Diffusion Barrier Coating on Nb Substrate

摘要

The sample preparation of coating system for use in a transmission electron microscope (TEM) is a thoroughly challenging process of viewing samples at the nano-level scale. Two different ion milling methods have be taken, argon ion slicer (AIS) and focused ion beam (FIB) which have the ability to reveal many of the characteristics of how thin films form. This Method has been applied to investigate cross-sectional structure of Re-based diffusion barrier coating on Nb substrate. The detailed micro-nano structure of coating specimen presented several crystal defects such as dislocations, stacking faults, voids and cracks.