A Novel Photodiode for Ultraviolet Spectral Range

摘要

Silicon-based ultra-shallow junction photodiodes have been successfully fabricated for light detection in the ultraviolet/blue spectral range. The characteristic of this new photodiode is octagon homocentric ring shaped geometry photosensitive area, which is used to improve the ultraviolet responsivity and suppress edge breakdown. Simulation results and silicon test results show the new photodiodes have good selectivity and low breakdown voltage. The presented photodiode can fully compatibility with standard CMOS process.