Inspection microscope, for the visible and ultraviolet spectral range and resistant antireflection layer for the visible and ultraviolet spectral range.

摘要

An inspection microscope for several wavelength ranges with at least one illuminating beam path and at least one imaging beam path. Those optical elements in the illuminating beam path and in the imaging beam path, through which beams of all wavelengths pass, are provided with a reflection-reducing layer, by means of which the wavelength ranges with reduced reflection are the visible VIS-wavelength range up to 650 nm, the i-lines at lambda=365 nm and the ultraviolet DUV-wavelength range from 240 nm to 270 nm. The reflection-reducing layer is a sandwich structure, comprising various material combinations, such as for example, M2/MgFSUB2 /SUBor M2/MgFSUB2/SUB/SiOSUB2 /SUBor M2/MgFSUB2/SUB/AlSUB2/SUBOSUB3/SUB, where M2 is a mixed substance from the company Merck, comprising AlSUB2/SUBOSUB3/SUB. The optical components with reduced reflectance preferably comprise quartz glass or CaFSUB2/SUB.