Nanoporous structures play a promising role in the development of nanomechanical, nanoelectrical and biosensing devices. In addition, nanopores can be utilized as chemical and gas sensors. TiO{sub}2 is a semiconductor material, which can have a wide range of applications in nanopore-based sensors. In this study, TiO{sub}2 nanopores were prepared by electrochemical anodization. Titanium was used as the anode, while platinum was used as the cathode in an electrochemical cell filled with a hydrofluoric acid electrolyte solution. During the preparation process, titanium was converted to its oxide form. Nanostructures were synthesized under varying physical conditions, including HF concentrations of 0.5-10% and anodization times of 5-30 minutes. The resulting nanopore structures were characterized by scanning electron microscopy (SEM). With a progressive increase in HF concentration (from 0.5% to 10%), the diameter of the nanopores decreased, from approximately 100nm in diameter to 50nm. The nanopores showed a transformation from tube-like structures to pore networks with increased HF concentration or anodization time. The results show that the dimensions and morphology of the nanopores can be controlled by alteration of the anodization conditions.
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机译：纳米多孔结构在纳米力学，纳米电气和生物传感装置的发展中起着有希望的作用。此外，纳米孔可用作化学和气体传感器。 TiO {Sub} 2是半导体材料，其可在基于纳米Ober的传感器中具有广泛的应用。在该研究中，通过电化学阳极氧化制备TiO {Sub} 2纳米孔。用作阳极的钛，而铂用作填充有氢氟酸电解质溶液的电化学电池中的阴极。在制备过程中，钛转化为氧化物形式。在不同的物理条件下合成纳米结构，包括0.5-10％的HF浓度和5-30分钟的阳极氧化次数。通过扫描电子显微镜（SEM）表征得到的纳米孔结构。通过逐渐增加HF浓度（从0.5％至10％），纳米孔的直径降低，直径约100nm至50nm。纳米孔显示出从管状结构转变为具有增加的HF浓度或阳极氧化时间的孔网络。结果表明，纳米孔的尺寸和形态可以通过改变阳极氧化条件来控制。
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