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Gas Sensor Based on the Network of SnO{sub}2 Semiconducting Nanowires

机译:基于SnO {Sub} 2半导体纳米线网络的气体传感器

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摘要

A simple and efficient way of preparing highly sensitive SnO{sub}2 nanowire-based gas sensors without an arduous lithography process was studied. The network of SnO{sub}2 nanowires could be suspended upon the Si substrate by separating the Au catalyst layer from the substrate. As the electric current is transported along the networks of the nanowires, not along the bottom layer on the substrate, the sensitivity to gases was maximized in the suspended and networked structures. The sensitivities were 18 and 180 when the NO{sub}2 concentrations were 0.5 and 5ppm. The response time was typically 20-50s.
机译:研究了一种简单有效的制备高度敏感的SnO {Sub} 2纳米线的气体传感器而没有艰苦的光刻工艺。通过将Au催化剂层与基材分离,可以在Si衬底上悬浮在Si衬底上的网络。由于电流沿纳米线的网络输送,而不是沿基板上的底层,在悬浮和网络结构中最大化对气体的敏感性。当NO {亚} 2浓度为0.5和5ppm时,敏感性为18和180。响应时间通常为20-50秒。

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