Infrared Reflectivity Studies On Composite HfO_(2)/SiO_(2) Thin Films

摘要

The HfO_(2)-SiO_(2) composite films were prepared by reactive electron beam co-deposition process with various pre-determined mixing compositions. The films have been characterized by FTIR spectroscopy. IR reflectivity data shows a regular trend with the increase of silica concentration. For low silica concentrations, refractive index shows anomalously hardened value, whereas for low hafnia concentrations, abosorption spectra show the formation of hafnium silicate.