Fabrication-tolerant 1310 nm laterally-coupled distributedfeedback lasers with high side mode suppression ratios

摘要

A laterally-coupled distributed feedback (LC-DFB) laser was designed and fabricated using stepper lithography. Such DFB lasers eliminate the need of the commonly required re-growth steps in a conventional DFB laser fabrication process. With LC-DFB lasers, the grating can be lithographically patterned out of the ridge waveguide. I ligh order gratings can enhance the lithographic tolerance for lower resolution patterning, yielding lasers more amenable to mass-manufacturing. 1310 nm InGaAsP/InP LC-DFB laser with third-order gratings was fabricated using i-line 5x stepper lithography. Excellent side mode suppression ratio over 52 dB has been measured with a single mode lasing around 1310 nm.