Miniaturized Fiber Optic Fabry-Perot pressure measuring system used for marine pressure measurement

摘要

We propose a miniaturized fiber optic fabry-perot pressure measuring system, which consists of two parts: ultra-highpressure sensor with embedded MEMS Fabry-Perot cavity and miniaturized phase demodulation system, for marinepressure measurement. The ultra-high pressure sensor have been analyzed and proved to meet the requirements of the fullocean pressure measurement by analyzing mechanical and optical characteristics. In order to meet the application demandsof marine pressure measurement, the pressure fatigue test and hydrostatic pressure test have been carried out. The testresults show that the pressure measuring system has a stable response relationship between the absolute phase and pressurein the range of 2–120 MPa, and no significant changes was found neither in four consecutive months of ultra-high pressuretests. The repeated error of system is less than 0.012MPa at 60MPa. The miniaturized measuring system can be applied tothe ocean profiling measurement plan named the Argo plan.