Six DOF Mirror Alignment System for Beamline Applications

摘要

The paper deals with the design and implementation of a high-precision six DOF parallel mechanism based system for mirror alignment inside a high vacuum chamber. Analysis and synthesis are carried out in order to meet the desired range of mirror mobility in six dimensions in the presence of cylindrical constraints due to the two-column support of the mirror. The beam alignment system should have a translation resolution of 1 μm and rotational resolution of 1 arc-sec about a remote mirror coordinate axis. This paper discusses in detail the design and development of a Mirror Positioning Mechanism System (MPMS) meeting the above requirements.