Research on Measurement and Process of Tungsten-Rhenium Thin Film Thermocouples sensor

机译：钨 - 铼薄膜热电偶传感器测量与过程研究

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A tungsten-rhenium thin film thermocouples (TFTCs) with ceramic substrate is fabricated and measured in order to establish temperature testing systems. The property of TFTCs with different kind of substrates are measured by and analyzed. The static temperature retention experiment is done to test the thermoelectric characteristics. The experiments showed that TFTCs work at 950K.

机译：制造和测量具有陶瓷基板的钨 - 铼薄膜热电偶（TFCS），以建立温度测试系统。通过并分析具有不同种类基材的TFCS的性质。静态温度保留实验是为了测试热电特性。实验表明，TFTCS在950K时工作。

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《International Conference on Nano/Micro Engineered and Molecular Systems》|2018年|xiv 678 p. :|共4页
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作者
Zhongkai Zhang; Bian Tian; Zhe Du; Qiuyue Yu; Qijing Lin; Na Zhao; Zhuangde Jiang;
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原文格式 PDF
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中图分类 TB383-532;
关键词
TFTCs; Seececk; magnetron sputtering;

机译：TFTCS;SEECECK;磁控溅射;

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专利

1. Impact of Magnetron Sputtering Parameters on Thermoelectric Properties of Tungsten-Rhenium Thin-Film Thermocouples Sensor [J] . Zhongkai Zhang, Bian Tian, Zhe Du, Sensors Journal, IEEE . 2018,第24期

机译：磁控溅射参数对钨hen薄膜热电偶传感器热电性能的影响
2. Effect of film deposition rate on the thermoelectric output of tungsten-rhenium thin film thermocouples by DC magnetron sputtering [J] . Journal of Micromechanics and Microengineering . 2020,第6期

机译：薄膜沉积速率对DC磁控溅射钨 - 铼薄膜热电偶热电输出的影响
3. Effect of heat treatment on thermoelectric properties of tungsten-rhenium thin-film thermocouples by RF magnetron sputtering [J] . Zhongkai Zhang, Bian Tian, Zhe Du, AIP Advances . 2018,第12期

机译：射频磁控溅射热处理对钨hen薄膜热电偶热电性能的影响
4. Research on Measurement and Process of Tungsten-Rhenium Thin Film Thermocouples sensor [C] . Zhongkai Zhang, Bian Tian, Zhe Du, International Conference on Nano/Micro Engineered and Molecular Systems . 2018

机译：钨 - 铼薄膜热电偶传感器测量与过程研究
5. Spin polarization measurements and sensor applications in thin films and carbon nanotube-based devices. [D] . Sanders, Jeff T. 2006

机译：自旋极化测量和传感器在薄膜和基于碳纳米管的设备中的应用。
6. Range Analysis of Thermal Stress and Optimal Design for Tungsten-Rhenium Thin Film Thermocouples Based on Ceramic Substrates [O] . Zhongkai Zhang, Bian Tian, Qiuyue Yu, 2017

机译：基于陶瓷基底的钨hen薄膜热电偶的热应力范围分析和优化设计
7. Study on thin film thermocouple measuring instantaneous temperature on surface of combustion chamber wall in internal combustion engine (2nd report, Study on thin film thermocouples embedded in combustion chamber wall) [O] . Yoshiteru ENOMOTO, Shoichi FURUHAMA 1986

机译：内燃机燃烧室壁表面薄膜热电偶测量瞬时温度的研究（第2篇报告，燃烧室壁薄膜热电偶研究）

Research on Measurement and Process of Tungsten-Rhenium Thin Film Thermocouples sensor

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