INTERFACE STRENGTH AND TOUGHNESS MEASUREMENTS IN MULTILAYERED SYSTEMS

摘要

Over the last years, miniaturization caused increasingly complex thin film combinations and geometries. Since macro scale tests are not suitable, small-scale experiments are suggested to study the materials response in current and future devices at small length scales. Here, focus is placed on the local determination of interface strength and toughness in layered thin films, also accounting for the presence of residual stresses.