THE FORMATION AND EVOLUTION OF CRACKS DURING NANOINDENTATION OF FUSED QUARTZ

摘要

Brittle materials such as fused quartz and other silicate glasses are commonly used in photovoltaics, semiconductors, and consumer electronics in the form of thin films. In these applications and a variety of others there is a need to understand how cracking occurs in these inherently brittle materials during contact and impact with hard, sharp objects.