RESIDUAL STRESS CHARACTERIZATION IN DLC COATING BY FOCUSED ION BEAM MILLING AND FINITE ELEMENT MODELING

摘要

Low friction Diamond-Like-Carbon coatings have broad applications to reduce wear and improve lifetime products [1]. Cost efficient PECVD deposited DLC is especially used in the automotive industry. These fabrication process lead to large intrinsic compressive stresses and eventually in service delamination, blisters with cracks may occur. Hence, reliable measurement technics and mechanical models devoted to the local stress distribution reveal important for optimizing the mechanical properties of the materials.