PLASTICITY AND SIZE EFFECTS IN GERMANIUM: FROM CRYOGENIC TO ELEVATED TEMPERATUTRES

摘要

Germanium is extensively used as a substrate in functional components of devices and microelectromechanical systems (MEMS) because of its tunable band structure and carrier mobility via. strain engineering [1]. The mechanical properties of Ge with a diamond-cubic structure at such small scales, i.e. in range of micro/nano-meter, are expected to be extraordinary since the improved strength and ductility of brittle crystals with minimized geometries [2]. Recent advances in nano-mechanical testing systems enable the investigation of the size- and temperature-dependent deformation behaviors and relevant parameters [3].